Investigation of a mesh criterion for three-dimensional finite element diffusion simulation

International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

Volumn , Issue , 1999, Pages 71-74

  Fleischmann, P ^a   Haindl, B ^a   Kosik, R ^a   Selberherr, S ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTERDIFFUSION (SOLIDS); STIFFNESS MATRIX;

SOFTWARE PACKAGE AMIGOS; THREE-DIMENSIONAL FINITE ELEMENT DIFFUSION SIMULATIONS;

INTEGRATED CIRCUIT LAYOUT;

EID: 0033285791     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)