Detailed analysis of the pre-breakdown current fluctuations in thin oxide MOS capacitors

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn , Issue , 1999, Pages 85-88

  Neri, B ^a   Crupi, F ^a   Basso, G ^a   Lombardo, S ^a  

^a UNIVERSITY OF PISA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; COMPUTER CONTROL SYSTEMS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC BREAKDOWN OF SOLIDS; LEAKAGE CURRENTS; PERSONAL COMPUTERS; SEMICONDUCTOR DEVICE TESTING;

SOFT BREAKDOWN (SBD); STRESS INDUCED LEAKAGE CURRENTS (SILC);

MOS CAPACITORS;

EID: 0033283944     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)