Integrated (automated) photon emission microscope and MOSFET characterization system for combined microscopic and macroscopic device analysis

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn , Issue , 1999, Pages 113-118

  Ng, T H ^a   Chim, W K ^a   Chan, D S H ^a   Phang, J C H ^a   Liu, Y Y ^a   Lou, C L ^a   Leang, S E ^a   Tao, J M ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; ELECTRIC CHARGE; EMISSION SPECTROSCOPY; HOT CARRIERS; MICROSCOPIC EXAMINATION; PHOTONS; SEMICONDUCTOR DEVICE TESTING; VOLTAGE MEASUREMENT;

PHOTON EMISSION MICROSCOPY;

MOSFET DEVICES;

EID: 0033283731     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)