Trade-offs in temperature control of fast-ramp RTP systems

Proceedings of the American Control Conference

Volumn 1, Issue , 1999, Pages 76-80

  De Roover, Dick ^a   Devasia, Santosh ^a  

^a SC Solutions   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONSTRAINT THEORY; CONTROL SYSTEM ANALYSIS; OPTIMAL CONTROL SYSTEMS;

FAST-RAMP RAPID THERMAL PROCESSING (RTP) SYSTEMS;

TEMPERATURE CONTROL;

EID: 0033283314     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)