Comparing CVA and ERA in transfer function measurements for lithography applications

Proceedings of the American Control Conference

Volumn 2, Issue , 1999, Pages 1171-1175

  Hunter Jr , Norman F ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; EIGENVALUES AND EIGENFUNCTIONS; IDENTIFICATION (CONTROL SYSTEMS); LITHOGRAPHY; MATHEMATICAL MODELS; SIGNAL TO NOISE RATIO; TIME SERIES ANALYSIS; TRANSFER FUNCTIONS;

CANONICAL VARIATE ANALYSIS (CVA); EIGENSYSTEM REALIZATION ALGORITHM (ERA);

LINEAR CONTROL SYSTEMS;

EID: 0033283309     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)