Development of an object-based equipment controller for semiconductor equipment communications

IECON Proceedings (Industrial Electronics Conference)

Volumn 3, Issue , 1999, Pages 1240-1245

  Deng, Jun Yan ^a   Cheng, Fan Tien ^a   Nguyen, Kevin ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER INTEGRATED MANUFACTURING; CONTROL SYSTEM ANALYSIS; CONTROL SYSTEM SYNTHESIS; HIGH LEVEL LANGUAGES; INTERFACES (COMPUTER); MATHEMATICAL MODELS; NETWORK PROTOCOLS; OBJECT ORIENTED PROGRAMMING; STANDARDS;

OBJECT-BASED EQUIPMENT CONTROLLERS; UNIFIED MODELING LANGUAGES (UML);

COMPUTER CONTROL SYSTEMS;

EID: 0033282066     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)