Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing

IECON Proceedings (Industrial Electronics Conference)

Volumn 1, Issue , 1999, Pages 6-10

  Lim, K W ^a   Luo, J ^a   Gu, J ^a   Poh, Y P ^a   Tan, W W ^a   Loh, A P ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; TEMPERATURE CONTROL; TEMPERATURE DISTRIBUTION; TEMPERATURE MEASUREMENT;

INTEGRATED IN-LINE TEMPERATURE MEASUREMENT SYSTEM;

LITHOGRAPHY;

EID: 0033282043     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)