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Volumn , Issue , 1999, Pages 43-44
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Slotted vias for dual damascene interconnects in 1Gb DRAMs
a a a a a a a a a a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
ASPECT RATIO;
CAPACITANCE;
DYNAMIC RANDOM ACCESS STORAGE;
ELECTRIC RESISTANCE;
ELECTROMIGRATION;
MASKS;
MICROPROCESSOR CHIPS;
REACTIVE ION ETCHING;
TUNGSTEN;
VAPOR DEPOSITION;
VLSI CIRCUITS;
DUAL DAMASCENE INTERCONNECTS;
PHYSICAL VAPOR DEPOSITION;
SLOTTED VIAS;
SYNCHRONOUS DYNAMIC RANDOM ACCESS MEMORY;
INTEGRATED CIRCUIT MANUFACTURE;
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EID: 0033281138
PISSN: 07431562
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (2)
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References (3)
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