SON (Silicon On Nothing) - a new device architecture for the ULSI era

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1999, Pages 29-30

  Jurczak, M ^a   Skotnicki, T ^a   Paoli, M ^a   Tormen, B ^a   Regolini, J L ^a   Morin, C ^a   Schiltz, A ^a   Martins, J ^a   Pantel, R ^a   Galvier, J ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTRIC PROPERTIES; MORPHOLOGY; MOSFET DEVICES; OXIDES; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES; ULSI CIRCUITS;

BULK SILICON; CHANNEL LENGTH; SILICON FILMS; SILICON ON NOTHING DEVICES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033280988     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)