Application of rapid thermal processing technology to the manufacture of integrated circuits - an overview

Journal of Electronic Materials

Volumn 28, Issue 12, 1999, Pages 1328-1332

  Bratschun, Alan ^a,b  

^a SEMATECH   (United States)

^b AGILENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT TREATMENT; ION IMPLANTATION; TECHNOLOGY TRANSFER;

THERMAL RAPID PROCESSING (RTP);

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0033280021     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-999-0117-8     Document Type: Article

References (13)

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