A holographic phase-shifting interferometer technique to measure in-plane distortion

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2703-2706

  Lim, Michael H ^a   Ferrera, Juan ^a   Pipe, K P ^a   Smith, Henry I ^a  

^a Department of Electrical Engineering and Computer Science   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033275685     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591049     Document Type: Article

References (9)

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8. K. B. Albaugh and D. H. Rasmussen, J. Am. Ceram. Soc. 75, 2655 (1992).
9. J. Ferrera, Ph.D. thesis, Massachusetts Institute of Technology, 1999.