In-line measurement of phase-shift non linearity

Annales de Physique

Volumn 24, Issue 3, 1999, Pages 43-50

  Mercier, R ^a   Lamare, M ^a   Picart, P ^a  

^a INSTITUT D'OPTIQUE GRADUATE SCHOOL   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033267080     PISSN: 00034169     EISSN: None     Source Type: Journal    
DOI: 10.1051/anphys:199903005     Document Type: Article

References (13)

1. C. Ai, Phase Measurement Accuracy Limitation in Phase Shifting Interferometry, Ph.D thesis, University of Arizona, Tucson, 1987.
2. C. Ai, J.C. Wyant, Effect of Piezoelectric Transducer Nonlinearity on Phase Shift Interferometry, Appl. Opt. 26, 1112 (1988).
3. K. Kinnstaetter, A.W. Lohmann, J. Schwider, N. Streibl, Accuracy of Phase Shifting Interferometry, Appl. Opt. 27, 5082 (1988).
4. K.E. Perry, J.J. McKelvie, Reference Phase Shift Determination in Phase Shifting Interferometry, Opt. Lasers Eng. 22, 77 (1995).
5. K. In-Bok, K. Seung-Woo, General Algorithm of Phase-shifting Interferometry by Iterative Least-squares Fitting, Opt. Eng. 34, 183 (1995).
6. K. In-Bok, K. Seung-Woo, Portable Inspection of Precision Surfaces by Phase-shifting Interferometry with Automatic Suppression of Phase-shift Errors, Opt. Eng. 34, 1400 (1995).
7. Y. Surrel, Phase Stepping: a New Self-Calibrating Algorithm, Appl. Opt. 32, 3598 (1993).
8. P. Picart, R. Mercier, M. Lamare, Influence of Multiple Beam Interferences in a Phase-Shifting Fizeau Interferometer and Error-Reduced Algorithms, Pure Appl. Opt. JEOS A 5, 167 (1996).
9. C.L. Koliopoulos, Interferometric Optical Phase Measurement Techniques, Ph.D. thesis, University of Arizona, Tucson, 1981.
10. Y.Y. Cheng, J.C. Wyant, Phase Shifter Calibration in Phase Shifting Interferometry, Appl. Opt. 24, 3049 (1985).
11. J. Schwider, Phase shifting Interferometry: Reference Phase Error Reduction, Appl. Opt. 28, 3889 (1989).
12. C.T. Farrell, M.A. Player, Phase Step Measurement and Variable Step Algorithms in Phase-shifting Interferometry, Meas. Sci. Technol. 3, 953 (1992).
13. K. Jambunathan, L.S. Wang, B.S. Dobbins, S.P. He, Semi-automatic Phase Shift Calibration Using Digital Speckle Pattern Interferometry, Opt. Laser Technol. 27, 145 (1995).