PREVAIL: Operation of the electron optics proof-of-concept system

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2851-2855

  Gordon, M S ^a   Lieberman, J E ^a   Petric, P F ^a,b   Robinson, C F ^a   Stickel, W ^a  

^a IBM MICROELECTRONICS   (United States)

^b KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033265536     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591082     Document Type: Article

References (4)

1. S. D. Golladay, R. A. Kendall, and S. K. Doran, J. Vac. Sci. Technol. B, these proceedings.
2. W. Stickel and G. O. Langner, J. Vac. Sci. Technol. B, these proceedings.
3. H. C. Pfeiffer et al., J. Vac. Sci. Technol. B, these proceedings.
4. K. Y. Lee and W. S. Huang, J. Vac. Sci. Technol. B 11, 2807 (1993).