Finite-element calculations of mechanical stresses induced by water adsorption/desorption in silicate glasses

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2603-2609

  Hoffmann, Thomas ^a   LeDuc, Philippe ^b   Senez, Vincent ^a  

^a Institut Superieur de l'Electronique et du Numerique   (France)

^b PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033265529     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591033     Document Type: Article

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