Modeling of the low-temperature production of gas-sensitive tin oxide films

Technical Physics

Volumn 44, Issue 4, 1999, Pages 452-453

  Kisin, V V ^a,b   Voroshilov, S A ^a,b   Sysoev, V V ^a,b   Simakov, V V ^a,b  

^a SARATOV STATE TECHNICAL UNIVERSITY   (Russian Federation)

^b SARATOV STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033247195     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1259319     Document Type: Article

References (8)

1. Y. K. Fang and J. J. Lee, Thin Solid Films 169, 51 (1989).
2. G. Williams and G. Coles, Sens. Actuators B 24-25, 469 (1995).
3. J.-L. Huang, D.-W. Kuo, and B.-Y. Shew, Surf. Coat. Technol. 79, 263 (1996).
4. S. Kaciulis, G. Mattogno, A. Galdikas et al., J. Vac. Sci. Technol. A 14, 3164 (1996).
5. M. Di Giulio, A. Serra, A. Tepore et al., Mater. Sci. Forum 203, 143 (1996).
6. S. K. Andreev, L. I. Popova, V. K. Gueroguiev, and E. B. Manolov, Vacuum 47, 1325 (1996).
7. V. V. Kisin, V. V. Sysoev, V. V. Simakov, and S. A. Voroshilov, in Proceedings of the Tenth European Conference on Solid State Transducers - "Eurosensors X,", Vol. 3 (Leuven, Belgium, 1996), pp. 977-980.
8. V. V. Kisin, S. A. Voroshilov, V. V. Sysoev, and V. V. Simakov, Pribory Tekh. Éksp., No. 5, pp. 178-181 (1995).