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Volumn 25, Issue 3, 1999, Pages 191-193
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Flexural vibrations of semiconductor wafers in the presence of a pulsed thermal excitation source
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0033244244
PISSN: 10637850
EISSN: None
Source Type: Journal
DOI: 10.1134/1.1262418 Document Type: Article |
Times cited : (2)
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References (10)
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