Ellipsometry on very thick multilayer structures

Physica Status Solidi (B) Basic Research

Volumn 215, Issue 1, 1999, Pages 247-251

  Garriga, M ^a   Alonso, M I ^a   Dominguez, C ^b  

^a INSTITUT DE CIÈNCIA DE MATERIALS DE BARCELONA ICMAB CSIC   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033242151     PISSN: 03701972     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-3951(199909)215:1<247::AID-PSSB247>3.0.CO;2-G     Document Type: Article

References (4)

1. R. M. A. AZZAM and N. M. BASHARA, Ellipsometry and Polarized Light, North-Holland, Amsterdam 1977.
2. F. JAMES, Minuit-Function Minimization and Error Analysis, CERN Program Library long writeup D506, 1994.
3. C. DE BOOR, A Practical Guide to Splines, Appl. Math. Sci., Vol. 27, Springer-Verlag, New York 1978.
4. J. B. THEETEN and D. E. ASPNES, Thin Solid Films 60, 183 (1979).