Fabrication of YBCO/CeO2/YBCO crossover and via structures for digital circuit and integrated SQUID applications

Superconductor Science and Technology

Volumn 12, Issue 11, 1999, Pages 1001-1003

  Tsukamoto, A ^a   Fukazawa, T ^a   Soutome, Y ^a   Tarutani, Y ^a   Takagi, K ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRITICAL CURRENTS; DIGITAL CIRCUITS; ELECTRIC RESISTANCE; ETCHING; FABRICATION; MULTILAYERS; OXIDE SUPERCONDUCTORS; SQUIDS; STRONTIUM COMPOUNDS; TEMPERATURE; YTTRIUM BARIUM COPPER OXIDES;

BUFFER LAYER; CROSSOVER STRUCTURE; VIA CONTACTS;

SUPERCONDUCTING FILMS;

EID: 0033226252     PISSN: 09532048     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-2048/12/11/391     Document Type: Article

References (5)

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3. 2 buffer layers Japan. J. Appl. Phys. 36 2646-51
4. Daly K P, Murduck J M, Pettiette-Hall C L and Sergant M 1995 Integration of step-edge grain boundary Josephson junctions with YBCO multilayers for electronics applications IEEE Trans. Appl. Supercond. 5 3131-4
5. Pettiette-Hall C L, Murduck J, Burch J F, Sergant M, Cordrump R Hu J, Luong M and Ellis R K 1997 Characterization and improvement of a YBCO multilayer film process for HTS circuit applications IEEE Trans. Appl. Supercond. 7 2057-62