SINIS fabrication process for realizing integrated circuits in RSFQ impulse logic

Superconductor Science and Technology

Volumn 12, Issue 11, 1999, Pages 864-867

  Balashov, D ^a,b   Khabipov, Mi ^a,b,c   Buchholz, F Im ^a   Kessel, W ^a   Niemeyer, J ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

^c LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL CURRENT DENSITY (SUPERCONDUCTIVITY); ELECTRIC CURRENTS; JOSEPHSON JUNCTION DEVICES; MULTILAYERS; QUANTUM ELECTRONICS; SUPERCONDUCTING MATERIALS;

INTRAWAFER PARAMETER SPREAD; RAPID SINGLE FLUX QUANTUM INTEGRATED CIRCUITS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0033226251     PISSN: 09532048     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-2048/12/11/351     Document Type: Article

References (9)

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