Investigation of SFQ integrated circuits using Nb fabrication technology

Superconductor Science and Technology

Volumn 12, Issue 11, 1999, Pages 897-900

  Numata, H ^a   Tanaka, M ^a   Kitagawa, Y ^a   Tahara, S ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL CURRENT DENSITY (SUPERCONDUCTIVITY); LITHOGRAPHY; LSI CIRCUITS; MAGNETRON SPUTTERING; NIOBIUM; REACTIVE ION ETCHING; SEMICONDUCTOR JUNCTIONS; SHIFT REGISTERS; TIMING CIRCUITS;

SINGLE FLUX QUANTUM INTEGRATED CIRCUITS; STEPPER LITHOGRAPHY;

INTEGRATED CIRCUIT LAYOUT;

EID: 0033226220     PISSN: 09532048     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-2048/12/11/361     Document Type: Article

References (8)

1. Nagasawa S, Hashimoto Y, Numata H and Tahara S 1995 A 380ps, 9.5 mW Josephson 4-Kbit RAM operated at a high bit yield IEEE Trans. Appl. Supercond. 5 2447-52
2. Likharev K K and Semenov V K 1991 RSFQ logic/memory family: a new Josephson-junction technology for sub-terahertz-clock-frequency digital system IEEE Trans. Appl. Supercond. 1 3-28
3. Numata H, Nagasawa S and Tahara S 1993 Fabrication process for sub-micron Josephson junctions Extended Abstracts of 4th Int. Superconductive Electronics Conf. (Boulder, CO) pp 280-1
4. Numata H, Nagasawa S and Tahara S 1996 Fabrication technology for a high-density Josephson LSI using an electron cyclotron resonance etching technique and a bias-sputtering planarization Supercond. Sci. Technol. 9 A42-A45
5. Mukhanov O A 1993 Rapid single flux quantum (RSFQ) shift register family IEEE. Trans. Appl. Supercond. 3 2578-80
6. Polonsky S V, Semenov V K and Shevchenko P N 1991 PSCAN: personal superconductor circuit analyser Supercond. Sci. Technol. 4 667-70
7. Kaplunenko V K 1998 Interactive simulator for superconducting electronics, presented at Appl. Supercond. Conf. 1998 (Palm Desert, CA, 1998)
8. Polonsky S V, Semenov V K, Bunyk P I, Kirichenko A F, Kidiyarova-Shevchenko A Y-U, Mukhanov O A, Shevchenko P N, Schneider D F, Zinoviev D Yu and Likharev K K 1993 New RSFQ circuits IEEE Trans. Appl. Supercond. 3 2566-77