Improvement of uniformity of NbCN/MgO/NbCN Josephson junctions for large-scale circuit applications

Superconductor Science and Technology

Volumn 12, Issue 11, 1999, Pages 877-879

  Yamamori, H ^a   Shoji, A ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRITICAL CURRENT DENSITY (SUPERCONDUCTIVITY); ELECTRODES; GRAIN SIZE AND SHAPE; LSI CIRCUITS; MORPHOLOGY; NIOBIUM COMPOUNDS; SUBSTRATES; SUPERCONDUCTING FILMS; SURFACES;

LARGE SCALE CIRCUIT; SUBSTRATE HOLDER ROTATION; TUNNEL BARRIERS;

JOSEPHSON JUNCTION DEVICES;

EID: 0033226209     PISSN: 09532048     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-2048/12/11/355     Document Type: Article

References (5)

1. x/Nb Integrated circuit process Extended Abstracts 6th ISEC'97 vol 2, pp 164-6
2. Smith A D, Thomasson S L and Dang C 1993 Reproducibility of niobium junction critical currents: statistical analysis and data IEEE Trans. Appl. Supercond. 3 2174-7
3. x/Nb junction characteristics IEEE Trans. Appl. Supercond. 3 2182-6
4. x/Al/Nb epitaxial base layer junctions IEEE Trans. Appl. Supercond. 3 2178-81
5. x-Al/Nb Josephson junctions: I-Sputtered Nb films for junction electrodes IEEE Trans. Appl. Supercond. 21-14