Research on phenomenon of the super-resolution in laser lithography

Guangxue Xuebao/Acta Optica Sinica

Volumn 19, Issue 11, 1999, Pages 1512-1517

  Shen, Yibing ^a   Yang, Guoguang ^a   Hou, Xiyun ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

LASER APPLICATIONS; OPTICAL RESOLVING POWER; PHOTORESISTS;

BINARY OPTICS; LASER DIRECT WRITER;

LITHOGRAPHY;

EID: 0033223986     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)