Review on research in ultra precision engineering at KIMM

International Journal of Machine Tools and Manufacture

Volumn 39, Issue 11, 1999, Pages 1793-1805

  Park, Chun Hong ^a   Lee, Eung Sook ^a   Lee, Husang ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ENGINEERING RESEARCH; FRICTION; HYDROSTATIC BEARINGS; INDUSTRY; MACHINE TOOL DRIVES; MACHINE TOOLS; MICROMACHINING; TURNING;

FRICTION DRIVE; HYDROSTATIC GUIDEWAY; POROUS AIR BEARING; ULTRA PRECISION TECHNOLOGY;

PRECISION ENGINEERING;

EID: 0033216667     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0890-6955(99)00032-2     Document Type: Article

References (12)

1. H. Lee et al., Development of an ultra precision machine, Research Report UCN 458-1755C, KIMM, 1992 [in Korean].
2. J.Y. Lee et al., Development of ultra precision aspheric generator, Research Report, Daewoo Heavy Ind. Co., 1996 [in Korean].
3. C.H. Park et al., Development of hydrostatic machine tool elements, Research Report BSG027-377M, KIMM, 1996:74 [in Korean].
4. C.H. Park, T. Moriwaki, E. Shamoto, Coupling mechanism for high precision feed table with ballscrew, in: JSME International Conference on Manufacturing Milestones toward the 21st Century, 1997, 139-143.
5. Y.C. Song, C.H. Park, H. Lee, S.T. Kimm, Basic characteristics of an active controlled capillary for compensating the error motion of hydrostatic guideways [in Korean], Journal of KSPE 14 (8) (1997) 130-136.
6. C.H. Park, Y.C. Song, H. Lee, S.T. Kimm, Improvement of motion accuracy using active controlled capillary in hydrostatic table [in Korean], Journal of KSPE 14 (12) (1997) 114-120.
7. J.H. Hwang, C.H. Park, C.H. Lee, H. Lee, Improvement of microstep characteristics in hydrostatic table with ballscrew [in Korean], Journal of KSPE 15 (1) (1998) 94-100.
8. Y.J. Shin, H. Lee, J.H. Hwang, Development of a twist roller type friction drive, in: Proc. of '96 KSPE Autumn Meeting, 1996, 658-661 [in Korean].
9. H. Ohmori, Electrolytic in-process dressing (ELID) grinding technique for ultra precision mirror surface machining [in Japanese], J. of JSPE 59 (9) (1993) 451-457.
10. J. Brannon, Excimer laser ablation and etching, IEEE Circuit and Device 13 (2) (1997) 11-18.
11. G.D. Poulin, P.A. Eisele, T.A. Znotins, Excimer laser and applications, SPIE 1023 (1988) 202-207.
12. H. Endert, R. Paetzel, D. Basting, Excimer lasers: a new tool for precision micromachining, Optical and Quantum Electronics 27 (12) (1995) 1319-1335.