Development of a focused ion beam (FIB) technique to minimize X-ray fluorescence during energy dispersive X-ray spectroscopy (EDS) of FIB specimens in the transmission electron microscope (TEM)

Ultramicroscopy

Volumn 80, Issue 2, 1999, Pages 69-84

  Longo, David M ^a   Howe, James M ^a   Johnson, William C ^a  

^a University of Virginia   (United States)

Author keywords

Energy dispersive X ray spectroscopy (EDS); Focused ion beam; Specimen preparation; Transmission electron microscopy

Indexed keywords

ENERGY DISPERSIVE SPECTROSCOPY; FLUORESCENCE; INTERDIFFUSION (SOLIDS); NICKEL; POLYCRYSTALLINE MATERIALS; SILICON; SPECIMEN PREPARATION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

DIFFUSION BARRIER; FOCUSED ION BEAM; ULTRAWIDE DOUBLE WEDGE; X RAY FLUORESCENCE;

ION BEAMS;

ANALYTIC METHOD; ARTICLE; DISPERSION; ELECTRON BEAM; ROENTGEN SPECTROSCOPY; THICKNESS; TRANSMISSION ELECTRON MICROSCOPY; X RAY FLUORESCENCE;

EID: 0033214343     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(99)00081-9     Document Type: Article

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