Oxidation of 6H-SiC(0001)

Microelectronic Engineering

Volumn 48, Issue 1, 1999, Pages 261-264

  Simon, L ^a,b   Kubler, L ^a   Ermolieff, A ^b   Billon, T ^b  

^a UNIVERSITÉ DE HAUTE ALSACE   (France)

^b CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; CARBON; IMAGE ANALYSIS; INTERFACES (MATERIALS); OXIDATION; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; SURFACE CLEANING;

ULTRA-HIGH VACUUM SURFACE CLEANINGS; X-RAY SPECTROSCOPY;

MOS CAPACITORS;

EID: 0033190178     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00384-6     Document Type: Article

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