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Journal De Physique. IV : JP

Volumn 9 pt 2, Issue 8, 1999, Pages

Boron doped polysilicon deposition in a sector reactor: specific phenomena and properties

(3) Scheid, E a Furgal, L a Vergnes, H b

a LAAS CNRS (France)

b CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; BORON COMPOUNDS; CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; GASES; POLYCRYSTALLINE MATERIALS; PRESSURE; REACTION KINETICS; SILANES; SUBSTRATES; SURFACE ROUGHNESS; TEMPERATURE;

BORON DOPED POLYSILICON; GAS PHASE REACTIONS; HOMOGENEITY; SECTOR REACTOR;

SILICON;

EID: 0033188039 PISSN: 11554339 EISSN: None Source Type: Conference Proceeding
DOI: 10.1051/jp4:19998111 Document Type: Article

Times cited : (4)

References (9)

1
- 0343241016
- th European conference on CVD
- th European Conference on CVD, Journal de Physique IV, 5 (1995) ppC5 997-C5 1004.
- (1995) Journal de Physique IV , vol.5
- Vergnes, H.¹ Scheid, E.² Duverneuil, P.³ Couderc, J.P.⁴

2
- 0001638523
- th European conference on CVD
- th European Conference on CVD, Journal de Physique IV, 5 (1995) ppC5 887-C5 894.
- (1995) Journal de Physique IV , vol.5
- Briand, D.¹ Sarret, M.² Duverneuil, P.³ Mohammed-Brahim, T.⁴ Kis-Sion, K.⁵

3
- 85088176256
- th European conference on CVD
- th European Conference on CVD, Journal de Physique IV, 1 (1991) ppC2 79-C2 86.
- (1991) Journal de Physique IV , vol.1
- Azzaro, C.¹ Scheid, E.² Bielle-Daspet, D.³ Duverneuil, P.⁴ Boudre, P.⁵

4
- 0015573880
- Eversteyn F.C., Put B.H., J. Electrochem. Soc., 120 (1973) pp106-110.
- (1973) J. Electrochem. Soc. , vol.120 , pp. 106-110
- Eversteyn, F.C.¹ Put, B.H.²

5
- 0016962523
- Chappelow E.E., Lin P.T., J. Electrochem. Soc., 123 (1976) pp913-918.
- (1976) J. Electrochem. Soc. , vol.123 , pp. 913-918
- Chappelow, E.E.¹ Lin, P.T.²

6
- 84975353131
- Maritan C.M., Berndt L.P., Tarr N.G., Bullerwell J.M., Jenkins G.M., J. Electrochem. Soc., 135 (1988) pp1793-1796.
- (1988) J. Electrochem. Soc. , vol.135 , pp. 1793-1796
- Maritan, C.M.¹ Berndt, L.P.² Tarr, N.G.³ Bullerwell, J.M.⁴ Jenkins, G.M.⁵

7
- 0007247323
- Koleske D.D., Gates S.M., Beach D.B., J. Appl. Phys., 72 (1992) pp4073-4081.
- (1992) J. Appl. Phys. , vol.72 , pp. 4073-4081
- Koleske, D.D.¹ Gates, S.M.² Beach, D.B.³

8
- 0026630887
- Duverneuil P., Couderc J.P., J. Electrochem. Soc., 139 (1992) pp296-304.
- (1992) J. Electrochem. Soc. , vol.139 , pp. 296-304
- Duverneuil, P.¹ Couderc, J.P.²

9
- 0026220514
- Bielle-Daspet D., Scheid E., Azzaro C., De Mauduit B., Pieraggi B., Thin Solid Films, 204 (1991) pp33-48.
- (1991) Thin Solid Films , vol.204 , pp. 33-48
- Bielle-Daspet, D.¹ Scheid, E.² Azzaro, C.³ De Mauduit, B.⁴ Pieraggi, B.⁵

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