New volatile heterocyclic metal diketonates for MOCVD

Journal De Physique. IV : JP

Volumn 9 pt 2, Issue 8, 1999, Pages

  Drozdov, A ^a   Troyanov, S ^a   Fedorchenko, O ^a   Battiston, G ^b   Pettinari, C ^c   Marchetti, F ^c   Cingolani, A ^c  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b CNR   (Italy)

^c UNIVERSITY OF CAMERINO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CHEMICAL BONDS; COPPER COMPOUNDS; CRYSTAL STRUCTURE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SINGLE CRYSTALS; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS;

BARIUM COMPLEXES; COPPER COMPLEXES; LIGAND; VOLATILE HETEROCYCLIC METAL DIKETONATOR; VOLATILITY;

VOLATILE ORGANIC COMPOUNDS;

EID: 0033187902     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:19998117     Document Type: Article

References (10)

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