Customizing optical illumination

Microlithography World

Volumn 8, Issue 4, 1999, Pages

  Smith, Bruce W ^a   Zavyalova, Lena ^a  

^a ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GEOMETRICAL OPTICS; LIGHTING; MASKS; OPTICAL INSTRUMENT LENSES; OPTICAL SYSTEMS; OPTIMIZATION;

OFF-AXIS ILLUMINATION (OAI); OPTICAL RESOLUTION ENHANCEMENT TECHNIQUES (RET);

PHOTOLITHOGRAPHY;

EID: 0033185496     PISSN: 1074407X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (10)