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Volumn 40, Issue 6, 1999, Pages 280-284
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Fracture toughness of multilayer silicon nitride with crack deflection
a b a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CRACK PROPAGATION;
CRYSTAL WHISKERS;
FRACTURE TOUGHNESS;
MULTILAYERS;
POROUS MATERIALS;
CRACK DEFLECTION;
SINGLE-EDGE-V-NOTCHED BEAM TECHNIQUE;
SILICON NITRIDE;
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EID: 0033185455
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-577X(99)00090-7 Document Type: Article |
Times cited : (6)
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References (19)
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