FEM analysis of thin-film inductors used in ghz frequency bands

IEEE Transactions on Magnetics

Volumn 35, Issue 5 PART 2, 1999, Pages 3580-3582

  Tauabe, Shiuji ^a   Shiraki, Yasuhiro ^b   Itoh, Keuji ^a   Yamagiichi, Masabiro ^b   Arai, Keu Ichi ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Finite clement method; MMIC; Soft magnetic films; Thin film inductor

Indexed keywords

FINITE ELEMENT METHOD; MAGNETIC FILMS; MATHEMATICAL MODELS; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; SOFT MAGNETIC MATERIALS; THIN FILM DEVICES;

THIN-FILM INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0033184406     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.800596     Document Type: Article

References (3)

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2. S, Ohniuma, n, Kobayashi, T. masumolo and H. Fujiinori, Soft Magnetic, Properties.of Co-Fe-O tliin Films with High Bs, J. of MSJ Vol.22, pp441-444, 1998
3. M, Yamaguchi, K. Suezawa, Y. Takahashi, K. I. Arai, S. Kikuchi, Y. Slilnwdn, S Tanabe and K. Itoli, IGHz-drive magnetic thin-film inductors for rf integrated circuits using micro-patterned granular film, Inlermag'99, ED-01, May 1999,