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Volumn 35, Issue 5 PART 1, 1999, Pages 2358-2360
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Tribological characteristics of sinx films
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Author keywords
Sinx; Tribology
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Indexed keywords
AMORPHOUS FILMS;
DURABILITY;
MAGNETIC DISK STORAGE;
MAGNETIC HEADS;
PRESSURE EFFECTS;
SIGNAL TO NOISE RATIO;
SILICON NITRIDE;
SPUTTER DEPOSITION;
THICK FILMS;
TRIBOLOGY;
X RAY PHOTOELECTRON SPECTROSCOPY;
CONTACT-START-STOP (CSS) TESTERS;
MAGNETIC FILM STORAGE;
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EID: 0033184185
PISSN: 00189464
EISSN: None
Source Type: Journal
DOI: 10.1109/20.800824 Document Type: Article |
Times cited : (6)
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References (6)
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