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Volumn 35, Issue 5 PART 1, 1999, Pages 2358-2360

Tribological characteristics of sinx films

Author keywords

Sinx; Tribology

Indexed keywords

AMORPHOUS FILMS; DURABILITY; MAGNETIC DISK STORAGE; MAGNETIC HEADS; PRESSURE EFFECTS; SIGNAL TO NOISE RATIO; SILICON NITRIDE; SPUTTER DEPOSITION; THICK FILMS; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0033184185     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.800824     Document Type: Article
Times cited : (6)

References (6)
  • 1
    • 0003824015 scopus 로고    scopus 로고
    • edited by T. McDaniel . and R. Victora, Noyes Publications, New Jersey, (1997)
    • Handbook of Magneto-optical Data Recording; edited by T. McDaniel . and R. Victora, Noyes Publications, New Jersey, (1997)
    • Handbook of Magneto-optical Data Recording
  • 3
    • 0032002283 scopus 로고    scopus 로고
    • "Characterization of the optical properties of PECVD SiNX films using ellipsometry and reflectometry"
    • Vol. 313-314, p!98-204, 1997
    • L. Asinovsky, F. Shen, and T. Yamaguchi, "Characterization of the optical properties of PECVD SiNX films using ellipsometry and reflectometry", Thin Solid Films, Vol. 313-314, p!98-204, 1997
    • Thin Solid Films
    • Asinovsky, L.1    Shen, F.2    Yamaguchi, T.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.