Detailed structure of the afterglow of radio-frequency chlorine discharge

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 8 B, 1999, Pages

  Nanbu, Kenichi ^a   Nakagome, Takeo ^a   Kageyama, Junichi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DENSITY (SPECIFIC GRAVITY); ELECTRIC POTENTIAL; ELECTRODES; ELECTRONS; GLOW DISCHARGES; IONIZATION; IONS; MONTE CARLO METHODS; PLASMAS; PRESSURE;

AFTERGLOW; ATTACHMENT; PARTICLE IN CELL; RADIO FREQUENCY CHLORINE DISCHARGE; RATES OF EXCITATION;

CHLORINE;

EID: 0033176568     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.l951     Document Type: Article

References (10)