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Volumn 38, Issue 8 B, 1999, Pages 4924-4925
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A Thomson scattering measurement system based on an infrared laser
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Author keywords
EEDF; Electron density; Electron temperature; Glow discharge; Infrared laser; Laser diagnostics; Plasma; Thomson scattering
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Indexed keywords
CARRIER CONCENTRATION;
ELECTRONIC PROPERTIES;
GASES;
GLOW DISCHARGES;
LASER DIAGNOSTICS;
OPTICAL VARIABLES MEASUREMENT;
PLASMAS;
SOLID STATE LASERS;
TEMPERATURE;
ELECTRON ENERGY DISTRIBUTION FUNCTION;
ELECTRON TEMPERATURE;
INDUCTIVELY COUPLED PLASMA;
INFRARED LASER;
THOMSON SCATTERING MEASUREMENT;
LIGHT SCATTERING;
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EID: 0033173927
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.38.4924 Document Type: Article |
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Times cited : (2)
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References (6)
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