Internal stress and adhesion of thin films sputtered onto glass by an in-line sputtering system

Thin Solid Films

Volumn 351, Issue 1-2, 1999, Pages 194-197

  Suzuki, S ^a  

^a ASAHI GLASS CO LTD   (Japan)

Author keywords

Adhesion; Sputtering; Stress

Indexed keywords

ADHESION; COMPRESSIVE STRESS; DURABILITY; GLASS; MATERIALS TESTING; MECHANICAL PROPERTIES; MECHANICAL VARIABLES MEASUREMENT; RESIDUAL STRESSES; SPUTTER DEPOSITION; TENSILE STRESS;

CONVEYOR DIRECTION; IN-LINE SPUTTERING SYSTEM; SCRATCH TEST; TABER ABRASION TEST;

THIN FILMS;

EID: 0033170228     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01791-X     Document Type: Article

References (13)

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13. S. Keitoku, T. Kamimori, M. Goto, Jpn. J. Appl. Phys. 25 (1986) 1668.