Optical proximity correction in laser direct writing

Guangxue Xuebao/Acta Optica Sinica

Volumn 19, Issue 7, 1999, Pages 953-957

  Du, Jinglei ^a   Huang, Qizhong ^a   Yao, Jun ^a   Zhang, Yixiao ^a   Guo, Yongkang ^a   Qiu, Chuankai ^a   Cui, Zheng ^a  

^a SICHUAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ERROR CORRECTION; PHOTOLITHOGRAPHY;

LASER DIRECT WRITING; OPTICAL PROXIMITY CORRECTION; PROXIMITY EFFECT;

LASER APPLICATIONS;

EID: 0033157815     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)