Effects of H-atoms on basic processes in H2/H2O/InP system

Vacuum

Volumn 54, Issue 1-4, 1999, Pages 179-182

  Gorbenko, V ^a   Gorban, A ^a   Shvets, J ^b  

^a Zaporozhye Inst State Munic Govt   (Ukraine)

^b ZAPORIZHZHIA NATIONAL UNIVERSITY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; AUGER ELECTRON SPECTROSCOPY; GASES; MASS SPECTROMETRY; METALLIZING; MIXTURES; OXIDATION; SEMICONDUCTING INDIUM COMPOUNDS; SURFACES; WATER;

ATOMIC HYDROGEN; INDIUM PHOSPHIDE;

HYDROGEN;

EID: 0033154330     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00456-4     Document Type: Article

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