VLSI design debug using focused ion beam technology

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 20, Issue 6, 1999, Pages 510-514

  Chang, Xu ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; PROGRAM DEBUGGING;

DESIGN DEBUG; FOCUSED ION BEAM; FOCUSED ION BEAM TECHNOLOGY;

VLSI CIRCUITS;

EID: 0033140749     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)