Outgassing from TiN and BN films grown on stainless steel by IBAD

Vacuum

Volumn 53, Issue 1-2, 1999, Pages 303-307

  Chung, K H ^a   Lee, S K ^a   Shin, Y H ^a   Lim, J Y ^a   Hong, S S ^a   Be, S H ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BEAMS; NITRIDES; STAINLESS STEEL; STRUCTURE (COMPOSITION); SURFACE CHEMISTRY; THIN FILMS; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM STRUCTURE; ION BEAM ASSISTED DEPOSITION;

DEGASSING;

EID: 0033132682     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00372-8     Document Type: Article

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