Influence of the vacuum chamber shape on the non-uniformity of gas distribution

Vacuum

Volumn 53, Issue 1-2, 1999, Pages 193-196

  Nesterov, S B ^a   Vassiliev, Yu K ^a   Kryukov, A P ^a  

^a MOSCOW POWER ENGINEERING INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DENSITY OF GASES; FLOW OF FLUIDS; MONTE CARLO METHODS; PRESSURE;

NON UNIFORMITY OF GAS DISTRIBUTION; VACUUM CHAMBER;

VACUUM;

EID: 0033132271     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00361-3     Document Type: Article

References (4)

1. Moore BC. Causes and consequences of non-uniform gas distributions in vacuum systems. J Vacuum Sci Technol 1968;6(1): 246-54.
2. Haefer RA. The application of ionization vacuum gauges to measurement in vacuum chambers provided with cryopumping surfaces. Vacuum 1980;30(415):193-5.
3. Koshmarov YuA, Rijov YuA. Applied Rarefied Gas Dynamics, 1st Ed. Moscow: Russia, 1977.
4. λ at low pressures. Low Temp Phys 1998;24(2):97-9.