Gas-phase synthesis of amorphous silicon nitride - reaction paths and powder characteristics

Journal of Materials Science

Volumn 34, Issue 9, 1999, Pages 2199-2206

  Ziegenbalg, G ^a   Focke, T ^a   Holldorf, H ^a   Brink, R ^b   Lange, H ^b  

^a TU BERGAKADEMIE FREIBERG   (Germany)

^b BAYER AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; CERAMIC MATERIALS; CRYSTALLIZATION; GASES; HIGH TEMPERATURE OPERATIONS; PRESSURE; SINTERING; SYNTHESIS (CHEMICAL);

GAS PHASE SYNTHESIS; GASEOUS INTERMEDIATES; POWDER CHARACTERISTICS; REACTION PATHS;

SILICON NITRIDE;

EID: 0033131107     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1004548801992     Document Type: Article

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