SCOPUS 정보 검색 플랫폼

Volumn 53, Issue 1-2, 1999, Pages 243-246

Measurement of helium retention in forepumps

Author keywords

[No Author keywords available]

Indexed keywords

FLOW OF FLUIDS; HELIUM; LEAK DETECTION; MASS SPECTROMETRY;

QUADRUPOLE MASS SPECTROMETER; TURBOMOLECULAR PUMP;

VACUUM PUMPS;

EID: 0033131011 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/S0042-207X(98)00384-4 Document Type: Article

Times cited : (2)

References (5)

1
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- Young JR. J Vac Sci Technol 1970;7:210.
- (1970) J Vac Sci Technol , vol.7 , pp. 210
- Young, J.R.¹

2
- 0009357034
- Walchi U. Eur Semicond 1996;18(6):5-6 Suppl.
- (1996) Eur Semicond , vol.18 , Issue.6 SUPPL. , pp. 5-6
- Walchi, U.¹

3
- 0004265663
- Amsterdam: North-Holland
- Roth A, Vacuum Technology. Amsterdam: North-Holland, 1976:427.
- (1976) Vacuum Technology , pp. 427
- Roth, A.¹

4
- 0009447172
- Hablanian M. J Vac Sci Technol A, 1991;9:2039.
- (1991) J Vac Sci Technol A , vol.9 , pp. 2039
- Hablanian, M.¹

5
- 0009394666
- Lafferty JM, editor. New York: Wiley
- Bley WG. In: Lafferty JM, editor. Foundations of Vacuum Science and Technology. New York: Wiley, 1998:481.
- (1998) Foundations of Vacuum Science and Technology , pp. 481
- Bley, W.G.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.