Nonorganic evaporation mask for superconducting nanodevices

Microelectronic Engineering

Volumn 46, Issue 1, 1999, Pages 149-152

  Hoss, T ^a   Strunk, C ^a   Schonenberger C ^a  

^a UNIVERSITY OF BASEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

MASKS; NANOSTRUCTURED MATERIALS; NIOBIUM;

NONORGANIC EVAPORATION MASKS;

SUPERCONDUCTING DEVICES;

EID: 0033130702     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00047-7     Document Type: Article

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