Criteria for uniform thin film formation for polymeric materials

Journal of Materials Science: Materials in Electronics

Volumn 10, Issue 2, 1999, Pages 141-144

  Pethrick, R A ^a   Rankin, K E ^a  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; ELECTRON BEAM LITHOGRAPHY; MATHEMATICAL MODELS; POLYMERS; SURFACE ROUGHNESS; VISCOSITY;

FILM THICKNESS; INTRINSIC VISCOSITY;

THIN FILMS;

EID: 0033115814     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1008920316701     Document Type: Article

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