Crystallographic defects in thermally oxidized wafer bonded silicon on insulator (SOI) substrates

Journal of Electronic Materials

Volumn 28, Issue 4, 1999, Pages 372-376

  Giles, Luis Felipe ^a   Kunii, Yasuo ^a  

^a Bio Medical Informatics Research Center   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); ETCHING; GROWTH (MATERIALS); HEAT TREATMENT; HIGH TEMPERATURE OPERATIONS; OXYGEN; STACKING FAULTS; SUBSTRATES; SUPERSATURATION; THERMOOXIDATION; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS PRECIPITATES; DEFECT ETCHING; OXIDATION INDUCED STACKING FAULTS; RETROGROWTH; WAFER BONDED SILICON ON INSULATOR STRUCTURES;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0033115216     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-999-0236-2     Document Type: Article

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