Study on the sputtered Nd2Fe14B thin films with composite target

Gongneng Cailiao/Journal of Functional Materials

Volumn 30, Issue 2, 1999, Pages 150-151,-154

  Zhao, Qiang ^a   Matsumoto, M ^a   Morisaco, A ^a  

^a LANZHOU UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FILM PREPARATION; MAGNETIC MATERIALS; SPUTTERING; TARGETS; THERMAL EFFECTS;

COMPOSITE TARGETS; PERMANENT MAGNETIC FILMS;

THIN FILMS;

EID: 0033108604     PISSN: 10019731     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)