Fabrication of ordered nanopore arrays of alumina on silicon substrate

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 20, Issue 4, 1999, Pages 314-318

  Wu, Junhui ^a   Zou, Jianping ^a   Zhu, Qing ^a   Bao, Ximao ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

NANOTECHNOLOGY; SEMICONDUCTING FILMS;

ANODIZATION; ORDERED NANOPORE ARRAYS;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0033108528     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)