New features of X-ray Bragg diffraction topography with coherent illumination

Physica Status Solidi (A) Applied Research

Volumn 172, Issue 1, 1999, Pages 3-13

  Kuznetsov, S ^a   Snigireva, I ^b   Souvorov, A ^b   Snigirev, A ^b  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COHERENT LIGHT; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SUBSTRATES; SYNCHROTRON RADIATION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

X RAY BRAGG DIFFRACTION TOPOGRAPHY;

SURFACE TOPOGRAPHY;

EID: 0033101062     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199903)172:1<3::AID-PSSA3>3.0.CO;2-Q     Document Type: Article

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