Pulsed laser deposition of (001) textured LiNbO 3 films on Al 2 O 3 /SiO 2 /Si substrate

Applied Surface Science

Volumn 141, Issue 1-2, 1999, Pages 197-200

  Hu, W S ^a   Liu, Z G ^a   Wu, Z C ^a   Liu, J M ^a   Chen, X Y ^a   Feng, D ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

68.55. a; 77.84. s; 81.15.Fg; 82.65. i; AK; LGT; PO; Pulsed laser deposition; SJ; Thin film; TI

Indexed keywords

ALUMINA; DEPOSITION; FILM GROWTH; INTERFACIAL ENERGY; LITHIUM NIOBATE; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SILICA; SUBSTRATES; THERMAL EFFECTS; THERMOOXIDATION; THIN FILM CIRCUITS;

PULSED LASER DEPOSITION (PLD);

SEMICONDUCTING FILMS;

EID: 0033100818     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00890-3     Document Type: Article

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