Anti-reflective coatings: A story of interfaces

Semiconductor International

Volumn 22, Issue 3, 1999, Pages 55-60

  Singer, Peter ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; LIGHT REFLECTION; LIGHT TRANSMISSION; OPTICAL FILMS; PHOTORESISTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SUBSTRATES; ULTRAVIOLET RADIATION;

BOTTOM ANTIREFLECTIVE COATINGS (BARC);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033100149     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (1)

1. M. Padmanaban, et. al., "Chemical and Lithographic Aspects of Organic Deep UV BARCs," SPIE 23rd Annual Symposium on Microlithography, February 1998.