Quartz-to-quartz direct bonding

Journal of the Electrochemical Society

Volumn 146, Issue 3, 1999, Pages 1104-1105

  Rangsten, P ^a   Vallin, O ^a   Hermansson, K ^a   Backlund, Y ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BINDING ENERGY; CHEMICAL CLEANING; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; ELECTROCHEMISTRY; SINGLE CRYSTALS;

DIRECT BONDING; HERMETICALLY SEALED CAVITIES;

QUARTZ;

EID: 0033100034     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1391728     Document Type: Article

References (12)